Deposition method and semiconductor device,申请号EP20050007007-传众专利搜索

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发明名称	Deposition method and semiconductor device
摘要
申请公布号	EP1583142(A3)	申请公布日期	2007.05.02
申请号	EP20050007007	申请日期	2005.03.31
申请人		发明人
分类号	C23C16/42;H01L21/312;C08G77/00;C09D4/00;C23C16/40;C23C16/509;H01L21/316;H01L21/768;H01L23/522	主分类号	C23C16/42
代理机构		代理人
主权项
地址

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