| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS resonator which suppresses variation in the frequency of each vibrator formed on a wafer.SOLUTION: A MEMS resonator (100) includes a vibrator (110) having a plurality of through holes (111, 112) formed therein, and a pair of first electrodes (120) and a pair of second electrodes (130) arranged separately from the vibrator and oppositely to each other across the center of the vibrator. A first straight line (151) connecting the center of the vibrator and the pair of first electrodes is perpendicular to a second straight line (152) connecting the center of the vibrator and the pair of second electrodes. The plurality of through holes are formed line symmetrically with respect to the first and second straight lines, and formed rotation symmetrically with respect to the center of the vibrator. The vibrator is fixed only by a support (140) for supporting the center of the vibrator.SELECTED DRAWING: Figure 1 |
