| 摘要 |
The present invention relates to a transfer robot having four robot arms and, particularly, to a transfer robot having variable hands of four robot arms, which can individually drive the four robot arms and simultaneously perform loading and withdrawal of objects to be transferred (substrates or wafers) vertically stacked with a regular pitch unit. The transfer robot having the variable hands of the four robot arms according to the present invention includes a first to a fourth robot arm forming position variable blocks therein, horizontally and vertically arranged and formed to perform linear motion backwards and forwards; and a first to a fourth robot hand coupled to the position variable blocks respectively and varying a left and right width within a set range. The present invention is realized to withdraw, transfer or stack the objects to be transferred from one set position to another set position, simultaneously or individually, thereby simultaneously transferring a plurality of the objects to be transferred, making an action for each pitch of process equipment or cassettes, and enhancing process efficiency. |
