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经营范围
发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH0959773(A)
申请公布日期
1997.03.04
申请号
JP19950237696
申请日期
1995.08.22
申请人
NISSIN ELECTRIC CO LTD
发明人
KIRIMURA HIROYA;MIKAMI TAKASHI
分类号
C23C14/48;(IPC1-7):C23C14/48
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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