METHOD AND DEVICE FOR TRANSFERRING WAFERS,申请号EP19990937847-传众专利搜索

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发明名称	METHOD AND DEVICE FOR TRANSFERRING WAFERS
摘要
申请公布号	EP1082756(B1)	申请公布日期	2007.01.31
申请号	EP19990937847	申请日期	1999.06.04
申请人	ASM INTERNATIONAL N.V.	发明人	HASPER, ALBERT;HUUSSEN, FRANK;KOOIJMAN, CORNELIS, MARINUS;OOSTERLAKEN, THEODORUS, GERARDUS, MARIA;VAN PUTTEN, JACK, HERMAN;RIDDER, CHRISTIANUS, GERARDUS, MARIA;SNIJDERS, GERT-JAN;STOUTJESDIJK, JEROEN, JAN;ZINGER, JAN
分类号	H01L21/00;B65G49/00;B65G49/07;H01L21/677	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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