| 发明名称 | Laser-sustained plasma light source | ||
| 摘要 | A laser sustained plasma light source having a cell with a gas volume contained within the cell. At least one laser is directed into the gas volume, for sustaining a plasma within the gas volume, which plasma produces a light. Means are provided for continuously providing the gas volume to the plasma in a laminar flow. A reflector collects the light and provides the light to a desired location. | ||
| 申请公布号 | US9526158(B1) | 申请公布日期 | 2016.12.20 |
| 申请号 | US201514814622 | 申请日期 | 2015.07.31 |
| 申请人 | KLA-Tencor Corporation | 发明人 | Bezel Ilya;Shchemelinin Anatoly;Zhao Yanming;Delgado Gildardo R. |
| 分类号 | H02J1/02;H05H1/24;H01J61/09;H01J1/02;H01J23/033 | 主分类号 | H02J1/02 |
| 代理机构 | Luedeka Neely Group, P.C. | 代理人 | Luedeka Neely Group, P.C. ;Barnes Rick |
| 主权项 | 1. A laser sustained plasma light source, comprising: a cell, a gas volume contained within the cell, at least one laser directed into the gas volume, for sustaining a plasma within the gas volume, the plasma producing a light, means for continuously providing the gas volume to the plasma in a laminar flow, and a reflector for collecting the light and providing the light to a desired location. | ||
| 地址 | Milpitas CA US | ||