MICRO-ACTUATOR, MICRO-ACTUATOR DEVICE, OPTICAL SWITCH AND OPTICAL SWITCH ARRAY

摘要

The movable part 21 is fastened to the substrate 11 via flexure parts 27 a and 27 b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable part 21 has second electrode parts 23 a and 23 b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror 12 which advances into and withdraws from the light path is disposed on the movable part 21. As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.