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发明名称
GERÄT UND VERFAHREN, UM DIE LEISTUNG VON MIKROMASCHINEN ODER MIKROELEKTROMECHANISCHEN BAUELEMENTEN ZU BESTIMMEN
摘要
申请公布号
AT389888(T)
申请公布日期
2008.04.15
申请号
AT20030447115T
申请日期
2003.05.20
申请人
IMEC VZW, INTERUNIVERSITAIR MICROELECTRONICA CENTRUM VZW
发明人
VAN SPENGEN, WILLEM MERLIJN
分类号
G01R31/327;G01R31/28;H01H11/00
主分类号
G01R31/327
代理机构
代理人
主权项
地址
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