| 摘要 |
A load cell type pickup head including rotation supporter and servomotor is provided to maximize reliability of a device by controlling detection value of a load cell which is a property of a force transducer in which an electrical output is generated. A load cell type pickup head comprises a first spline shaft(41), a first ball spline(40), a rotation supporter(50), and a servomotor. The first spline shaft has an adsorption plug of an electronic component, and is moved to up and down. The first ball spline has a first outer tube(45) controlling a rotation of the spline shaft. The rotation supporter supports the first outer tube of the first ball spline. The servomotor operates a rotation of the rotation supporter which is supported by a body. The first spline shaft is penetrated. Up and down section is sealed by an air pocket(30) supported inside the body. An inner space of the air pocket is connected to a connection pipeline of the body. The connection pipeline is connected to an air supply unit using a connection line. The first spline shaft of the first ball spline is connected to a load cell sensing part(60). A control part controls a detection value by sensing pressure due to a contact of the first spline shaft using a load cell(68).
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