| 摘要 |
A laser heterodyne interference linearity measuring apparatus and method having six-degrees-of-freedom detection. The laser heterodyne interference linearity measuring apparatus comprises a laser heterodyne interference linearity and position detection portion and an error detection and compensation portion; in a light path structure of the laser heterodyne interference linearity and position detection portion, a four-degrees-of-freedom error detection light path consisting of three ordinary beam splitters (2, 5, 13), a polarization beam splitter (14), a plane reflector (10), a convex lens (4), a position sensitive detector (3) and two four-quadrant detectors (15, 16) is added; by utilizing a method combining laser heterodyne interferometry and a laser spot detection method, six-degrees-of-freedom simultaneous detection on a swing angle, a pitch angle, a roll angle, horizontal linearity, vertical linearity and linearity positions of a detected object is realized, and error compensation is performed on the vertical linearity and a vertical linearity position, so that the influence of a rotating error of the detected object on a measurement result during the linearity measuring process is eliminated, and the measurement precision on the laser heterodyne interference linearity and positions thereof is improved. |
