Single crystal pulling apparatus and low heat conductive member used for single crystal pulling apparatus

摘要

A single crystal pulling apparatus (1) has a quartz crucible (2) for accommodating silicon melt (3), a graphite crucible (4) for retaining the quartz crucible (2), a tray (5) for securing and holding the graphite crucible (4) from below, and a crucible rotating shaft (6) for supporting the tray (5) from below and for elevating and lowering the tray (5) and the crucibles (2), (4) while rotating them. A low heat conductive member (10) is interposed on a joint surface between the tray (5) and the crucible rotating shaft (6). The low heat conductive member (10) is formed in a substantially tubular shape, and is interposed in such a manner that a protruding portion of the crucible rotating shaft (6) is inserted through a center hole of the low heat conductive member (10). Thereby, a gap portion (11) is formed below a bottom portion of the tray (5).

主权项

1. A single crystal pulling apparatus comprising: a crucible unit including a crucible and a tray for securing and holding the crucible from below; and a crucible rotating shaft for supporting the tray from below and for elevating and lowering the tray and the crucible while rotating the tray and the crucible, wherein the single crystal pulling apparatus has a gap portion formed by interposing a low heat conductive member for suppressing heat conduction from the crucible to the crucible rotating shaft at least one of on a joint surface between the crucible and the tray and on a joint surface between the tray and the crucible rotating shaft, so that at least one of (i) the crucible and the tray do not make direct contact with each other and (ii) the tray and the crucible rotating shaft do not make direct contact with each other.