Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof

摘要

A showerhead for chemical vapor deposition includes: a plurality of reactive gas showerhead modules separated each other and having the same number as the number of kinds of reactive gases injected from the showerhead, each having a mixing zone in the reactive gas showerhead module to induce a mixing of a reactive gas and an injection support gas used to regulate the injection velocity of the reactive gas and a plurality of reactive gas injection tubes connected to the bottom surface of the reactive gas showerhead module for injecting the reactive gas mixed with the injection support gas over the substrate; and a purge gas showerhead module mounted under the reactive gas showerhead modules, with a purge gas supply port for supplying a purge gas to the purge gas showerhead module.

主权项

1. An apparatus for chemical vapor deposition (CVD) with a showerhead through which a reactive gas of at least one kind and a purge gas are injected over a substrate located in a reaction chamber to deposit a film on the substrate, the showerhead comprising:
a plurality of reactive gas showerhead modules separated each other and having the same number as the number of kinds of reactive gases injected from the showerhead, each having a mixing zone in the reactive gas showerhead module to induce a mixing of a reactive gas and an injection support gas used to regulate the injection velocity of the reactive gas and a plurality of reactive gas injection tubes connected to the bottom surface of the reactive gas showerhead module for injecting the reactive gas mixed with the injection support gas over the substrate; and a purge gas showerhead module mounted under the reactive gas showerhead modules, having a purge gas supply port for supplying a purge gas to the purge gas showerhead module, an inner space separated from the inner spaces of the reactive gas showerhead modules and for being filled with the purge gas only, and a plurality of purge gas exits at the bottom surface of the purge gas showerhead module for injecting the purge gas over the substrate, wherein each of the reactive gas injection tubes connected to the upper reactive gas showerhead module passes through the lower reactive gas showerhead module along the inside of a guide tube provided in the lower reactive gas showerhead module and the reactive gas injection tube connected to the upper or lower reactive gas showerhead module passes through the purge gas showerhead module.