摘要 |
PURPOSE:To easily simulate the growing process of crystal grains of a polycrystalline thin film. CONSTITUTION:In the process for analyzing crystal growing process of a polycrystalline thin film, a triple point P0 and crystal grain boundaries B1-B3 connecting the triple point P0 are approximated by straight lines and the growth of crystal grain with time is simulated by numeric calculation by tracing exclusively the movement of the triple point P0 at definite time intervals. The moving direction (moving vector V0) of the triple point P0 is determined by the sum of vectors (V1+V2+V3) under the assumption that the crystal grain boundary moves in the line direction of the boundary. |