| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a device for generating atmospheric pressure plasma wherein the atmospheric pressure plasma capable of plasma treatment in the approaching and receding direction to and from a reaction space for generating plasma and in a two-dimensionally wide range can be generated by a small input power. <P>SOLUTION: Primary plasma 6 comprising a first inert gas made plasmatic is made to jet out from the reaction space 1 by supplying the first inert gas 5 to the reaction space 1 and impressing a high frequency electric field from a high frequency power supply 4 on it. Thereby, a mixed gas region 10 in which a mixed gas 8 mixed mainly with a second inert gas and with a proper amount of reactive gas exists is formed so that the primary plasma 6 collides with the mixed gas region, and secondary plasma 11 comprising the mixed gas made plasmatic is generated. <P>COPYRIGHT: (C)2008,JPO&INPIT |
