| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microwave plasma treatment device realizing appropriate arrangement of a sealing member that shuts off communication between a treatment chamber and the atmosphere, an integrated type slot forming member, a manufacturing method and a method of use for the microwave plasma treatment device. <P>SOLUTION: The microwave plasma treatment apparatus is provided with a slot antenna 30, which propagates microwave through a slot 37b and a treatment chamber, in which a prescribed gas is turned into a plasma by the microwave propagated through the slot antenna 30 and a treating object G is plasma-treated. An integrally formed type slot forming member 37, which is formed integrally with the slot 37b filled with a dielectric member 37c inserted into a frame 37a for inserting the slot 37b, is installed at the lower part of a waveguide. An O-ring 50 is arranged between the frame 37a constituted of a metal and a lid main body 21. <P>COPYRIGHT: (C)2008,JPO&INPIT |
