| 摘要 |
PROBLEM TO BE SOLVED: To provide a catalyst body unit freely detachable to a chamber of a heat generator CVD apparatus, and the heat generator CVD including the catalyst unit.SOLUTION: A catalyst unit 100 including a unit basic body 110 freely detachably fixed to a chamber of a heat generator CVD apparatus, a raw material gas supply tube 23 supported by the unit basic body 110 and inserted into the chamber, a pair of electrodes 18 supported by the unit basic body 110, and a linear-shaped catalyst body 19 connected to the electrode pair 18 and arranged along a side surface of the raw material supply tube 23, the catalyst body 19 having a return part 19a.SELECTED DRAWING: Figure 1 |
