| 摘要 |
<p>An inspection method and device for foreign matters inside a through hole, capable of a high-speed inspection on foreign matters inside a through hole at low costs and with a good accuracy. Rays of light passing from a plurality of through holes of the same size are simultaneously captured as image data, the number of lumps in the captured lump area corresponding to the plurality of through holes is counted, and a work having the counted number of lumps agreeing with a preset value is subjected to relative comparison with respect to an adjacent lump area, whereby the presence/absence of foreign matters is judged.</p> |
