METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE

摘要

This method for manufacturing a piezoelectric device is a method for manufacturing a piezoelectric device (101) that is provided with a substrate (4), a piezoelectric layer (6) which is arranged above the substrate (4) and is directly or indirectly supported by the substrate (4), a heater (1), and a heater electrode for driving the heater (1). This method for manufacturing a piezoelectric device comprises: a step wherein the piezoelectric layer (6), the heater (1) and the heater electrode are formed; and a step wherein the heater (1) is driven by applying an electric current to the heater electrode and a heat treatment of the piezoelectric device (101) is carried out by means of the heat that is generated by the heater (1).