| 摘要 |
A system includes a plurality of sensors at distinct and separate locations, each of the distinct and separate locations being equidistant from a region that Is configured to pass light that propagates along a beam path, the sensors being configured to sense radiation from an optical element positioned to interact with light that propagates on the beam path; and a controller including one or more electronic processors and a computer-readable medium, the computer- readable medium including instructions that, when executed, cause the one or more electronic processors to receive an output from each of the sensors, the output of each sensor including an indication of an intensify of the radiation detected by the sensor, and analyze the received output to determine a position of the light that propagates along the beam path. |
