| 摘要 |
PROBLEM TO BE SOLVED: To determine accurately in a short time the thickness or the content and the density of each element and/or each compound in a measuring object comprising elements and/or compounds of a plurality of known kinds. SOLUTION: An X-ray 2 is transmitted through the measuring object 3, and a transmission X-ray is detected by a detector 4 capable of energy discrimination, and a measured X-ray intensity at a prescribed energy is determined by a detection signal and imparted to a data processing part 6. When an absorption end wavelength of an included element of the measuring object 3 can be used, determination is performed by solving simultaneous equations wherein a theoretical transmission X-ray intensity ratio determined from a mass absorption coefficient in each wavelength before and after the absorption end and a measured transmission X-ray intensity ratio or the like are treated as known values, and the element thickness is treated as an unknown value. When the absorption end wavelength cannot be used, determination is performed by utilizing also a measurement result of a direct X-ray, and by solving simultaneous equations wherein the intensity ratio between the theoretical transmission X-ray and the direct X-ray determined from the mass absorption coefficient in a plurality of wavelengths and the intensity ratio between the measured transmission X-ray and the direct X-ray are treated as known values, and each thickness of each element and/or each compound is treated as an unknown value. COPYRIGHT: (C)2007,JPO&INPIT
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