| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for detecting an edge of the surface shape with high sensitivity by irradiating the surface shape having high reflectivity and having an irregular sawtooth shape or the like with laser light. SOLUTION: This method for detecting the edge of the surface shape by irradiating the irregular surface shape having high reflectivity with the laser light is characterized by irradiating the surface shape with the laser light at such an angle that the irradiation direction of the laser light is not orthogonal to the edge tangent direction of the surface shape. COPYRIGHT: (C)2007,JPO&INPIT
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