| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem wherein the yield of an inspection product is reduced due to the difference of an expectation value pattern from the output pattern from a non-defective article. SOLUTION: A test device 50 tests the inspection product 20 by using the test pattern and expectation value pattern. The test device 50 comprises a control section 1 for outputting the test pattern to the inspection product 20, a pattern conversion section 5 for converting the expectation value pattern, based on the output pattern output from the specimen 20, accompanying the input of the test pattern, and a determination section 7 for determining whether the specimen 20 is a non-defective article or a defective article using the expectation value pattern after the conversion. COPYRIGHT: (C)2009,JPO&INPIT
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