发明名称 圧電センサの製造方法
摘要 A sheet-like flexible printed substrate (3) having a copper foil (50) affixed to the entirety of one main surface thereof is prepared (S1). Conductor patterns are formed (S2) on the one main surface of the flexible printed substrate (3). The flexible printed substrate (3) is stamped with a press die, and a flexible printed substrate (30) is formed (S3). A conductive adhesive is used to affix (S4) a piezoelectric film (31) to the top of a first detection electrode (34) of a substrate section (36). The substrate section (36) in a state of having had the piezoelectric film (31) affixed to the top of the first detection electrode (34) thereof is pressed (S5). A substrate section (37) is folded back, the conductive adhesive is used to affix a second detection electrode (35) to the piezoelectric film (31), and the piezoelectric film (31) is sandwiched (S6) between the first detection electrode (34) and the second detection electrode (35). A pushing element (17) is attached (S8) to a sensor unit (16). The pushing element (17) and the sensor unit (16) in a state in which the piezoelectric film (31) is being sandwiched are pressed (S9).
申请公布号 JP6052434(B2) 申请公布日期 2016.12.27
申请号 JP20150554818 申请日期 2014.12.19
申请人 株式会社村田製作所 发明人 河村 秀樹;中路 博行;山口 喜弘;遠藤 潤;斉藤 誠人
分类号 G01L1/16;H01L41/113;H01L41/193;H01L41/29;H01L41/31;H01L41/33;H01L41/45 主分类号 G01L1/16
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