Collation method of stocker storage in semiconductor wafer cassette transportation apparatus

摘要

According to a collation method of stocker storage in a semiconductor wafer cassette transportation apparatus having high semiconductor wafer cassette transportation ability, a host computer responds to an instruction from an operator to interrogate a stocker controller about storage of a semiconductor wafer cassette in a stocker. The stocker controller receiving the interrogation reports storage of a semiconductor wafer cassette in a stocker to the host computer. When the storage information retained by the host computer differs from the storage information reported from the stocker controller, the host computer provides a display of the discrepancy in storage information on an operator's terminal.