| 摘要 |
To provide a vaporizer which can be used long time without blockage, and possible to stably supply raw materials to reaction part. <??>A gas passage 2 formed inside of main body of a dispersion part 1, a gas inlet opening 4 to introduce pressurized carrier gas 3 into gas passage 2, a means 6 to supply raw material solution 5 to carrier gas passing gas passage 2, a gas outlet 7 to send carrier gas including dispersed raw material solution 5 to vaporization part 22, a dispersion part 8 to flow through gas passage 2 having means 18 to cool, a vaporization pipe 20 connected with a reaction part and gas outlet 7 of dispersion part 8 of the device, and a heater 21 to heat vaporization pipe 20 is provided, a vaporization part 22 to heat and vaporizes the carrier gas where raw materials solution is dispersed is provided, and a radiation prevention portion 102 having small hole 101 for the outside of gas outlet 7 is provided. <IMAGE> |
