DEVICE FOR INSPECTING SUBSTRATE HAVING IRREGULAR ROUGH SURFACE AND INSPECTION METHOD USING SAME

摘要

A device (102) for inspecting a substrate (P) having a rough surface has: first irradiation systems (114, 116) that irradiate the substrate (P) with a first detection light; a first detection system (112) that detects unevenness in brightness from the entire rough surface of the substrate irradiated by the first detection light; second irradiation systems (124, 126) that irradiate the substrate with second detection light having a wavelength different from the first detection light; and a second detection system (122) that detects defects in the rough surface of the substrate irradiated by the second detection light. A detection device and detection method that detect both the unevenness in the brightness and local pattern defects of the substrate having the irregular rough surface effectively and at low cost are provided.