| 摘要 |
PROBLEM TO BE SOLVED: To provide an annular protrusion removal device in which the risk of damaging an annular protrusion can be reduced when removing the annular protrusion.SOLUTION: The annular protrusion removal device for removing an annular protrusion 25 from a wafer unit 59 formed from a wafer 11 in which a parting groove is formed in a boundary portion between a circular recess and an annular protrusion 25, an adhesive tape 58 and an annular frame 56 comprises: hold means for holding the wafer unit 59; and annular protrusion removal means which includes a plurality of claws 46 capable of simultaneously moving between a standby position and active positions mutually close in a radial direction, and perpendicular move means for moving the plurality of claws 46 in a perpendicular direction, and removes the annular protrusion 25 from the wafer unit 59. The plurality of claws 46 include: an air emission port 49 for forming an exfoliation origin by emitting air to an interface between the annular protrusion 25 of the wafer 11 formed in a distal end and the adhesive tape 58; and an air supply path 47 of which one end is communicated to the air emission port 49 and the other end is connected to an air supply source 51. |
