| 摘要 |
<p>An apparatus for exposing a semiconductor substrate is provided to prevent damage of equipment owing to fire or burning by employing smoke sensors for detecting whether or not a lighting system unit is burned. A lighting system unit(250) generates, transmits, and focuses a light(203). A semiconductor substrate is placed on a stage(255). The stage is arranged to irradiate the light emitted from the lighting system unit to the placed semiconductor substrate. At least one smoke sensors(207,217,227) are installed on the lighting system unit. The smoke sensors detect whether or not the lighting system unit is burned. A controller(260) receives information with respect to the burning of the lighting system unit from the smoke sensors. An alarm generator(265) is connected to the controller.</p> |
