| 摘要 |
PROBLEM TO BE SOLVED: To increase the size of a suction cup by making the suction cup correspond to an increase of the size of a workpiece, and to smoothly move the suction cup together with a stage, while maintaining flatness accuracy. SOLUTION: This stage device 10 has a stone surface plate 20, the stage 30 moving on a plane of the stone surface plate 20, the suction cup 40 mounted on the stage 30 to suck the flat plate shaped workpiece, and a pair of Y linear motors 50 for moving the stage 30 in the Y direction. The suction cup 40 has a square-shaped suction surface 42. Four sides of the X and Y directions of the suction surface 42 are formed to have larger dimensions than that of an X stage 38, and a width dimension of the X direction is formed to have a smaller dimension than that of the stone surface plate 20. The stage device 10 has four supports 60 extending in the vertical direction from a lower face of the suction cup 40 and an air pad 70 provided at a lower end of each support 60 to be movable by floating on the plane of the stone surface plate 20 by air pressure. The suction cup 40 is moved on the stone surface plate 20 since the supports 60 and the air pad 70 are directly supported. COPYRIGHT: (C)2007,JPO&INPIT
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