发明名称 |
METHOD FOR REMOVING METAL CONTAMINATION AND APPARATUS FOR REMOVING METAL CONTAMINATION |
摘要 |
The present invention relates to a method and an apparatus for removing metal contamination. Contamination of a fluorine-based resin used for a medical fluid supply line can be removed effectively in a short period of time. In removing metal contamination existent on an inner wall of the fluorine-based resin used for the medical fluid supply line (25) supplying a medical fluid to an object to be treated, the method: supplies a washing material having reactivity to metal forming the metal contamination to the medical fluid supply line (25) with a portion of or the whole of the washing material in a gas phase; and allows the gas phase washing material to react to the metal contamination existent on the inner wall of the fluorine-based resin used for the medical fluid supply line (25) so as to remove the metal contamination. |
申请公布号 |
KR20160076467(A) |
申请公布日期 |
2016.06.30 |
申请号 |
KR20150182676 |
申请日期 |
2015.12.21 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
ITO YUDAI;DOBASHI KAZUYA;SAITO MISAKO;KOJIMA SHIGEYOSHI;NISHIMURA HIDEKI |
分类号 |
H01L21/02;C02F103/34;H01L21/67 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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