发明名称 METHOD FOR REMOVING METAL CONTAMINATION AND APPARATUS FOR REMOVING METAL CONTAMINATION
摘要 The present invention relates to a method and an apparatus for removing metal contamination. Contamination of a fluorine-based resin used for a medical fluid supply line can be removed effectively in a short period of time. In removing metal contamination existent on an inner wall of the fluorine-based resin used for the medical fluid supply line (25) supplying a medical fluid to an object to be treated, the method: supplies a washing material having reactivity to metal forming the metal contamination to the medical fluid supply line (25) with a portion of or the whole of the washing material in a gas phase; and allows the gas phase washing material to react to the metal contamination existent on the inner wall of the fluorine-based resin used for the medical fluid supply line (25) so as to remove the metal contamination.
申请公布号 KR20160076467(A) 申请公布日期 2016.06.30
申请号 KR20150182676 申请日期 2015.12.21
申请人 TOKYO ELECTRON LIMITED 发明人 ITO YUDAI;DOBASHI KAZUYA;SAITO MISAKO;KOJIMA SHIGEYOSHI;NISHIMURA HIDEKI
分类号 H01L21/02;C02F103/34;H01L21/67 主分类号 H01L21/02
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