| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room air conditioning facility, and an abnormality detection method for a clean room for stably maintaining a temperature and humidity of the clean room suiting a manufacturing environment of semiconductors. SOLUTION: An air conditioner 1 of the clean room has temperature measuring means 40B and 41B for measuring a first temperature of air before treatment in a heat exchange coil 21 of an interior, and a second temperature of air after treatment, a temperature comparing means 31 for comparing a necessary cold amount calculated from a difference between a measured value of the first temperature and a measured value of the second temperature with a cold amount calculated from an opening signal for controlling an automatic regulating valve 25 connected to the heat exchange coil 21, and a means 31 for detecting an abnormality in the air conditioner 1 from a comparison result in the temperature comparing means 31. COPYRIGHT: (C)2006,JPO&NCIPI |
