SHAPE SENSING SYSTEM OF CHIP, AND SENSING METHOD USING THIS

摘要

PROBLEM TO BE SOLVED: To provide a shape sensing system of a chip and the sensing method using this. SOLUTION: The system and method includes a support plate 120 to which at least one chip 122 is separately stuck, a lower lighting section 112 that is arranged under the support plate 120 and emits light so that the light transmits through the support plate 120 between the chips 122, and a light recognition section for sensing the light having transmitted through the support plate 120. The chip 122 is used for processing an electric signal. The chip 122 has a shape deformed within an allowable range. COPYRIGHT: (C)2008,JPO&INPIT