Reaction system for growing a thin film

摘要

An atomic deposition (ALD) thin film deposition apparatus includes a deposition chamber configured to deposit a thin film on a wafer mounted within a space defined therein. The deposition chamber comprises a gas inlet that is in communication with the space. A gas system is configured to deliver gas to the gas inlet of the deposition chamber. At least a portion of the gas system is positioned above the deposition chamber. The gas system includes a mixer configured to mix a plurality of gas streams. A transfer member is in fluid communication with the mixer and the gas inlet. The transfer member comprising a pair of horizontally divergent walls configured to spread the gas in a horizontal direction before entering the gas inlet.

主权项

1. An atomic layer deposition (ALD) thin film deposition apparatus, comprising:
a cross-flow deposition chamber configured to deposit a thin film on a wafer mounted within a space defined therein, the deposition chamber comprising a gas inlet that is in communication with the space, and a gas outlet positioned and configured to allow flow through the deposition chamber from the inlet to the outlet, wherein the flow is approximately parallel to a major surface of the wafer, the deposition chamber further comprising a sealing portion that includes a radially and inwardly extending end that forms a sealing surface; and a susceptor comprising a wafer-supporting surface configured to support the wafer within the space, the susceptor configured to move vertically with respect to the deposition chamber between a first position in which the susceptor seals against the sealing surface and a second, lower position in which the susceptor no longer seals against the sealing surface; wherein, in the first position, an interface is defined between the sealing surface and the susceptor such that an inner edge of the radially and inwardly extending end contacts the susceptor to form a portion of the interface, wherein the radially and inwardly extending end of the sealing portion has a thickness between the sealing surface and a top surface of the sealing portion that is less than about 3 mm, wherein the deposition chamber comprises a top plate and a bottom plate and wherein the bottom plate forms, at least in part, the sealing portion and the top plate forms, at least in part, the gas inlet.