| 摘要 |
The invention relates to an apparatus for analyzing a surface area of an object, comprising: a laser device (10) configured to emit monochromatic incident light (101) of a first wavelength (» 1 ) as well as optionally a monochromatic incident light (102) of a second wavelength (» 2 ) that differs from the first wavelength (» 1 ), a first deflection means (20) configured to deflect said incident light (101, 102) onto a point (P ij (x i , y j )) of a surface area (A) of an object that is to be analyzed so that scattered light (104) is generated at said point (P ij (x i , y j )), wherein said deflection means (20) is further configured to deflect said incident light (101, 102) such that said surface area (A) is scanned in a pointwise fashion by said incident light (101, 102), a first sensor means (40) configured to detect said scattered light (104) and to provide from said detected scattered light (104) a scatter data set (S ij (» k )) for the respective point (P ij (x i , y j )), wherein the respective scatter data set (S ij (» k )) comprises intensities of the detected scattered light (104) for different wave numbers, and a processing unit (50) for processing and/or analyzing said data sets. Further, the invention relates to a method for analyzing a surface area of an object. |
