| 摘要 |
<p>PURPOSE:To provide a process data diagnositic method that can simply detect the abnormal value of plural process data which are related to each other. CONSTITUTION:Plural process data stored in a 1st storage means 25 are added together by an addition means 28 so that the sum data is calculated. A 1st decision means 29 decides whether the sum data is included within an allowable range set for the sum data set value stored in a 2nd storage means 27. If not included, a 2nd decision means 30 decides whether each of process data is included in an allowable range set for the process data set value stored in the means 27. Thus the abnormal data is detected and the error information is printed by a printer 23. Meanwhile each process data and the sum data are shown on a display 22 and then stored in a magneto-optical disk device 21.</p> |
