POGO PIN OF APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE AND OPERATING METHOD THEREOF TO MAINTAIN UNIFORM CONTACT PRESSURE IN POGO PIN AND REDUCE ABSORPTION OF FLAKES AT PLUNGER OR CONTACT TIP OF POGO PIN

摘要

PURPOSE: A pogo pin of an apparatus for inspecting a semiconductor device is provided to maintain a uniform contact pressure in a pogo pin and reduce absorption of flakes at a plunger or a contact tip of a pogo pin by additionally forming a screw part in the pogo pin, thereby changing a vertical piston method to a combination type of a rotation method and a vertical piston method. CONSTITUTION: A cylindrical barrel(295) whose inside is empty is used as a main body of a pogo pin(277). A contact tip is formed at an end of the barrel. A spring(297) contracts or expands in the barrel, connected to the contact tip. A plunger makes a piston motion, connected to the opposite of the spring connected to the contact tip. A female screw is formed on the inner wall of the barrel. A male screw is formed in the plunger connected to the spring. The female screw and the male screw operate as a pair.