| 摘要 |
According to the present invention, a thin plate member in an unheated state is introduced into an upstream-side chamber having a low oxygen atmosphere with an oxygen concentration of 0.01% or less. Thereafter, inside a treatment chamber having a low oxygen atmosphere with a constant oxygen concentration of 0.01% or less, the thin plate member is loaded onto a heating plate heated to a predetermined heating temperature and the thin plate member is heated. Inside the treatment chamber, the thin plate member is loaded onto a cooling plate cooled to a predetermined cooling temperature and the thin plate member is cooled. Next, the thin plate member is left in the atmosphere. |
