| 摘要 |
A diffusion apparatus 32 for use with a spraybar 20 used in, for example, supplying an inerting gas such as nitrogen into a process chamber. The apparatus comprises a sleeve 30 of mesh material 34 for providing around the spraybar 20. The mesh material may be single layered or multi-layered in which case it could be spirally wound or formed into concentric sleeves. In operation, the sleeve acts to further diffuse the gas emanating from the spraybar thereby to provide the diffusion performance similar to an expensive and easily broken sintered spraybar without the back pressure problems associated therewith. <IMAGE> |
