| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of detecting leak in a sensor chamber in housing and responding to it. SOLUTION: A sensing body 1 has a thin part 10 at the tip end of a pressure introduction hole 8. The sensing body 7 is inserted in an insertion hole 5 formed in the sensor housing 1. Inside the sensor housing 1, a closed sensor pressure chamber 1 is formed and on the thin part 10 of the sensing body 7 a sensing chip 14 is connected at the pressure chamber R1 so that the displacement of the thin part 10 of the sensing body 7 due to the pressure difference between the pressure introduction hole 8 and the sensor pressure chamber R1 is converted to on electric signal and taken out. In the sensor pressure chamber R1, a housing internal pressure monitor element 19 for making the pressure variation in the sensor pressure chamber R1 to electric signal and outputting is arranged.
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