发明名称 |
METHOD AND SYSTEM FOR HETEROGENEOUS SUBSTRATE BONDING FOR PHOTONIC INTEGRATION |
摘要 |
A method of fabricating a composite integrated optical device includes providing a substrate comprising a silicon layer, forming a waveguide in the silicon layer, and forming a layer comprising a metal material coupled to the silicon layer. The method also includes providing an optical detector, forming a metal-assisted bond between the metal material and a first portion of the optical detector, forming a direct semiconductor-semiconductor bond between the waveguide, and a second portion of the optical detector. |
申请公布号 |
US2016202415(A1) |
申请公布日期 |
2016.07.14 |
申请号 |
US201514880936 |
申请日期 |
2015.10.12 |
申请人 |
Skorpios Technologies, Inc. |
发明人 |
Krasulick Stephen B.;Dallesasse John |
分类号 |
G02B6/122;G02B6/136;G02B6/12 |
主分类号 |
G02B6/122 |
代理机构 |
|
代理人 |
|
主权项 |
1. (canceled) |
地址 |
Albuquerque NM US |