Apparatus and method for measuring a three dimensional shape

摘要

Provided are an apparatus and a method for measuring a three dimensional shape with improved accuracy. The apparatus includes a stage, at least one lighting unit, a plurality of image pickup units and a control unit. The stage supports an object to be measured. The lighting unit includes a light source and a grid, and radiates grid-patterned light to the object to be measured. The image pickup units capture, in different directions, grid images reflected from the object to be measured. The control unit calculates a three dimensional shape of the object from the grid images captured by the image pickup units. The present invention has advantages in capturing grid images through a main image pickup portion and sub-image pickup portions, enabling the measurement of the three dimensional shape of the object in a rapid and accurate manner.

主权项

1. An apparatus for measuring a three dimensional shape comprising:
a projecting unit generating and radiating a grid-patterned light; an X-Y axis transferring table installed under the projecting unit to transfer an inspection object; a beam splitting unit installed between the projecting unit and the X-Y axis transferring table to (1) pass the grid-patterned light to the inspection object and (2) receive and pass a light image reflected from the inspection object; a plurality of reflecting mirrors installed between the beam splitting unit and the X-Y axis transferring table, and spaced apart from each other in a circumferential direction, wherein each of the plurality of reflecting mirrors reflects the light image reflected from the inspection object; and a plurality of imaging units installed at a side of the beam splitting unit and at sides of the plurality of reflecting mirrors, respectively, to capture (1) the light image reflected from the inspection object and passing through the beam splitting unit and (2) the light image reflected from the inspection object and reflected from the plurality of reflecting mirrors.