发明名称 METHOD FOR REMOVING TRANSPARENT MATERIAL USING LASER WAVELENGTH WITH LOW ABSORPTION CHARACTERISTIC
摘要 According to embodiments, a method of selectively ablating an optically transparent material covering a metal layer of a device may comprise: providing a layer of optically transparent material on a metal layer; and irradiating a portion of the layer of optically transparent material with a defocused or shaped laser beam and ablating the portion of the layer of optically transparent material; wherein the ablating leaves the metal layer completely intact and wherein the laser light has a wavelength within a range of 355 nm to 1070 nm and wherein the layer of optically transparent material absorbs less than or equal to 50% of the laser light from the laser beam on a single pass of the laser light through the layer of optically transparent material. Apparatus for laser ablation of a layer of transparent material on a metal layer, while leaving the metal layer completely intact are described.
申请公布号 WO2016183596(A1) 申请公布日期 2016.11.17
申请号 WO2016US32792 申请日期 2016.05.16
申请人 APPLIED MATERIALS, INC. 发明人 FRANKLIN, Jeffrey L.
分类号 B23K26/36;B23K26/00;B23K26/352;B23K26/364;B23K103/00 主分类号 B23K26/36
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