Position measuring apparatus, pattern transfer apparatus, and method for manufacturing a device

摘要

A position measuring apparatus configured to measure a position of an measured object using a plate-like scale including a grating pattern, includes a supporting unit configured to be arranged between a structure and the scale and to support the scale, in which the supporting unit includes a spring element that reduces vibration transferred from the structure to the scale in a plate thickness direction.

主权项

1. A position measuring apparatus for measuring a position of a measured object, the position measuring apparatus comprising:
a sensor head provided on the measured object; a scale irradiated with light from the sensor head and having a thickness in a direction of gravitational force; a structure supported by a floor via a vibration isolation apparatus that reduces vibration transferred from the floor to the structure; and a supporting unit disposed between the structure and the scale, and configured to support the scale in the direction, wherein the supporting unit includes a spring element having a spring constant that reduces vibration, transferred from the floor to the scale through the vibration isolation apparatus and the structure, in the direction, wherein, in a case where a mass of an object including the scale and supported by the supporting unit is set to m and the spring constant of the supporting unit is set to k, a frequency fc in the direction represented by the following Equation is set to a value equal to or less than 10 Hz,fc=12⁢π·|k|m wherein the position measuring apparatus comprises a position sensor configured to measure a relative position in the direction between the structure or a reference object mounted on the structure and the scale, wherein the position measuring apparatus further comprises a driving unit configured to drive the object including the scale in the direction based on an output from the position sensor, wherein the supporting unit has a negative spring constant, and wherein a servo control frequency for positioning the object including the scale in the direction by the driving unit and the position sensor is set to a value, not less than 1 and not greater than 10, times the fc.