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发明名称
FORMATION OF SILICON WAFER
摘要
申请公布号
JPH0855825(A)
申请公布日期
1996.02.27
申请号
JP19950209325
申请日期
1995.07.26
申请人
AT & T CORP
发明人
ANTON YOHAN MIRAA
分类号
H01L21/304;B24B7/22;B28D5/00;C30B15/00;C30B33/00;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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