Method for plasma generation by means of a capacitive multipolar-barrier discharge, and device for implementing same

摘要

The plasma production method involves the placing of a multipolar magnetic barrier (11) between the active (4) and passive (3) discharge electrodes. The magnetic field lines extend from both sides of a plane of separation (P), parallel to the electrodes so as to ensure the oscillation, between the poles, of high speed electrons accelerated by the active electrode. This creates zones of plasma production and circulation on either side of the magnetic barrier. An Independent claim is included for a device for producing a plasma by capacitive discharge in accordance with the invention.