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发明名称
CONTAINER AND LOADER FOR SUBSTRATE
摘要
申请公布号
EP0959495(A4)
申请公布日期
2008.09.10
申请号
EP19970946808
申请日期
1997.12.01
申请人
DAINICHI SHOJI K.K.;RORZE CORPORATION
发明人
OHYAMA, KOJI;NAKAYAMA, TOSHIYA;SAKIYA, FUMIO;KINPARA, MINEO;FUJII, TOSHIAKI;HORITA, OSAMU
分类号
B65G49/07;H01L21/677;(IPC1-7):H01L21/68
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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