| 发明名称 |
PELLICLES AND METHODS OF MANUFACTURING THE SAME |
| 摘要 |
A method of manufacturing a pellicle includes forming a membrane on a first surface of a substrate from a chemical reaction in which the substrate serves as a catalyst, forming a protective pattern on a second surface of the substrate, immersing the substrate in an etchant solution, such that a portion of the substrate exposed through the protective pattern is removed to form a frame, and replacing the etchant solution with a solvent. |
| 申请公布号 |
US2016201201(A1) |
申请公布日期 |
2016.07.14 |
| 申请号 |
US201514969645 |
申请日期 |
2015.12.15 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM Mun-Ja;KIM Tae-Sung;YOO Ji-Beom;KIM Byung-Gook;KIM Soo-Young;SHIN Dong-Wook;CHOI Jae-Hyuck |
| 分类号 |
C23F1/14 |
主分类号 |
C23F1/14 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing a pellicle, the method comprising:
forming a membrane on a first surface of a substrate from a chemical reaction in which the substrate serves as a catalyst; forming a protective pattern on a second surface of the substrate; immersing the substrate in an etchant solution, such that a portion of the substrate exposed through the protective pattern is removed to form a frame; and replacing the etchant solution with a solvent. |
| 地址 |
Suwon-si KR |
