| 摘要 |
The present invention provides a magnetic annealing apparatus which continuously processes multiple wafers. The magnetic annealing apparatus comprises: a receiving container returning area which returns a receiving container receiving a group of materials to be processed; a material returning area which returns the materials; and a control part, wherein the receiving container returning area and the material returning area are formed by leaving an opening and closing door therebetween. A first arrangement part, multiple second arrangement parts, a storage part for storing multiple receiving containers, and a receiving container returning device are arranged in the receiving container returning area. An aligner, a material retainer, receiving containers arranged in the second arrangement parts, a material returning device, a heating unit, a magnetic field generating unit having a horizontal superconducting magnet, and a transfer device for transferring the materials to the inside of the magnetic field generating unit are arranged in the material returning area. |
