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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0798358(A)
申请公布日期
1995.04.11
申请号
JP19930243190
申请日期
1993.09.29
申请人
TOSHIBA CORP
发明人
HASEGAWA KIYOSHI;FUKUBA YOSHINORI
分类号
G01R31/28;H01L21/66;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
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