发明名称 Copper-containing layer on under-bump metallization layer
摘要 A semiconductor device includes an under-bump metallization (UBM) layer over a substrate. The semiconductor device also includes a copper-containing layer having a base portion over the UBM layer. The semiconductor device further includes a solder bump over the UBM layer and over the copper-containing layer. The base portion is embedded in the solder bump. The copper-containing layer has a cylindrical shape and includes at least two segments separated by at least two openings. A first total area (A) of the at least two openings is greater than about 3% of a second total area (B) of the at least two segments. The first total area (A) is less than about 70% of the second total area (B) of the at least two segments.
申请公布号 US9472524(B2) 申请公布日期 2016.10.18
申请号 US201514863942 申请日期 2015.09.24
申请人 Taiwan Semiconductor Manufacturing Co., Ltd. 发明人 Chen Yu-Feng;Lin Chun-Hung;Pu Han-Ping;Tung Chih-Hang;Wu Kai-Chiang;Ho Ming-Che
分类号 H01L23/488;H01L23/00 主分类号 H01L23/488
代理机构 Eschweiler & Associates, LLC 代理人 Eschweiler & Associates, LLC
主权项 1. A semiconductor device, comprising: an under-bump metallization (UBM) layer over a substrate; a copper-containing layer having a base portion over the UBM layer; and a solder bump over the UBM layer and over the copper-containing layer, the base portion being embedded in the solder bump; wherein the copper-containing layer has a cylindrical shape and comprises at least two segments separated by at least two openings,a first total area (A) of the at least two openings is greater than about 3% of a second total area (B) of the at least two segments, andthe first total area (A) is less than about 70% of the second total area (B) of the at least two segments.
地址 Hsin-Chu TW