发明名称 |
Copper-containing layer on under-bump metallization layer |
摘要 |
A semiconductor device includes an under-bump metallization (UBM) layer over a substrate. The semiconductor device also includes a copper-containing layer having a base portion over the UBM layer. The semiconductor device further includes a solder bump over the UBM layer and over the copper-containing layer. The base portion is embedded in the solder bump. The copper-containing layer has a cylindrical shape and includes at least two segments separated by at least two openings. A first total area (A) of the at least two openings is greater than about 3% of a second total area (B) of the at least two segments. The first total area (A) is less than about 70% of the second total area (B) of the at least two segments. |
申请公布号 |
US9472524(B2) |
申请公布日期 |
2016.10.18 |
申请号 |
US201514863942 |
申请日期 |
2015.09.24 |
申请人 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
发明人 |
Chen Yu-Feng;Lin Chun-Hung;Pu Han-Ping;Tung Chih-Hang;Wu Kai-Chiang;Ho Ming-Che |
分类号 |
H01L23/488;H01L23/00 |
主分类号 |
H01L23/488 |
代理机构 |
Eschweiler & Associates, LLC |
代理人 |
Eschweiler & Associates, LLC |
主权项 |
1. A semiconductor device, comprising:
an under-bump metallization (UBM) layer over a substrate; a copper-containing layer having a base portion over the UBM layer; and a solder bump over the UBM layer and over the copper-containing layer, the base portion being embedded in the solder bump; wherein
the copper-containing layer has a cylindrical shape and comprises at least two segments separated by at least two openings,a first total area (A) of the at least two openings is greater than about 3% of a second total area (B) of the at least two segments, andthe first total area (A) is less than about 70% of the second total area (B) of the at least two segments. |
地址 |
Hsin-Chu TW |